Data repository for "Extreme Ultraviolet Photoresponse of Organotin-based Photoresists with Borate Counter Anions" by Quentin Evrard, Najmeh Sadegh, Simon Mathew, Ed Zuidinga, Benjamin Watts, Maximilian Paradiz Dominguez, Angelo Giglia, Nicola Mahne, Stefano Nannarone, Akira Nishimura, Tsuyoshi Goya, Takuo Sugioka, Michaela Vockenhuber, Yasin Ekinci, Albert M. Brouwer
ACS Applied Materials and Interfaces, 2024, https://doi.org/10.1021/acsami.4c08636
Experimental data for TinPFPB and TinTB (except XAS) are in Data_TinPFPB_TinTB.zip X-ray absorption data are in X-ray absorption spectra.zip Pdf versions of the figures are in Figures.zip X-ray diffraction data of TinPFPB are in XRD structure.zip